Quality control and electrical properties of thin amorphous (SiC)1-x(AlN)x films produced by radio frequency dual magnetron sputtering
Mater. Science Forum Vols. 645-648, 1199
Autor(es):G. Gálvez de la Puente, O. Erlenbach, J. A. Guerra Torres, T. Hupfer, M. Steidl, F. De Zela, R. Weingärtner, and A. Winnacker
Año: 2010