Determination of the sputter rate variation pattern of a silicon carbide target for radio frequency magnetron sputtering using optical transmission measurement
Mater. Science Eng. B 174, 127
Autor(es):G. Gálvez de la Puente, J. A. Guerra Torres, O. Erlenbach, M. Steidl, R. Weingärtner, F. De Zela, and A. Winnacker
Año: 2010