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Determination of the sputter rate variation pattern of a silicon carbide target for radio frequency magnetron sputtering using optical transmission measurement
Mater. Science Eng. B 174, 127
Año de publicación: 2010
Thermal activation and cathode-luminescence measurements of Tb3+-doped a‑(SiC)1‑x(AlN)x thin films
Mater. Science Forum Vols. 645-648, 459
Año de publicación: 2010
Quality control and electrical properties of thin amorphous (SiC)1-x(AlN)x films produced by radio frequency dual magnetron sputtering
Mater. Science Forum Vols. 645-648, 1199
Año de publicación: 2010
Determination of the optical bandgap of thin amorphous (SiC)1-x(AlN)x films
Science Forum Vols. 645-648, 263